CMP Slurry; Used In The Process Of Chemical Mechanical Planarization (CMP)

 CMP (chemical mechanical planarization) slurries are widely used for chemical mechanical planarization. CMP slurry primarily used to develop disk-drive components, silicon wafers, and different types of microelectronic surfaces. CPM is one of the crucial steps used multiple times during the manufacture of semiconductors. CPM is used to remove excess material from each layer of the wafer to create a smooth surface with the help of a liquid known as a CMP slurry. It is a liquid diffusion used in the process of chemical mechanical planarization.

Moreover, CMP has become a standard manufacturing process to fabricate memory disks and integrated circuits (IC). Thus, with the increasing adoption of Internet of 5G, Things (IoT), automotive, etc., the demand for CMP slurry is also increasing. The Internet of Things (IoT) and digitization require semiconductor technologies as the basis of their framework. Vehicle automation, kitchen automation, smart connected TVs, smart grids, smart city, are among the many IoT concepts that require semiconductor in their framework.

The slurry is a stable mixture of abrasive materials dispersed in DI wafer with other chemicals, such as surfactant, inhibitor, and oxidant. CMP slurry is used with polishing naps or CMP pads, which are rotated against a wafer surface or substrate during the CMP process. CMP has become an indispensable technique to fabricate integrated circuits. A wafer surface is polished, during the CMP process, for planarization using a slurry and a polishing pad. CMP has played an important role in manufacturing transistors and other interconnect devices.

With the rapid growth of the semiconductor industry and increasing demand for semiconductor, the demand for CMP slurry is also increasing with a rapid pace. Thus, manufactures are adopting various inorganic strategies to meet increasing demand. For instance, in January 2020, Entegris, Inc. acquired Sinmat, CMP slurry manufacturer, to expand its already broad specialty chemicals portfolio. Entegris has manufacturing, customer service, and/or research facilities in Taiwan, South Korea, Singapore, Malaysia, Israel, France, China, Canada, the United States, Japan, and Germany.

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